Horizontal Gate-All-Around Device Having Wrapped-Around Source and Drain

ABSTRACT

A method of forming a semiconductor device includes forming a fin extending from a substrate. The fin has a source/drain (S/D) region and a channel region. The fin includes a first semiconductor layer and a second semiconductor layer on the first semiconductor layer. The first semiconductor layer has a first composition, and the second semiconductor layer has a second composition different from the first composition. The method further includes removing the first semiconductor layer from the S/D region of the fin such that a first portion of the second semiconductor layer in the S/D region is suspended in a space. The method further includes epitaxially growing a third semiconductor layer in the S/D region, the third semiconductor layer wrapping around the first portion of the second semiconductor layer.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experiencedexponential growth. Technological advances in IC materials and designhave produced generations of ICs where each generation has smaller andmore complex circuits than the previous generation. In the course of ICevolution, functional density (i.e., the number of interconnecteddevices per chip area) has generally increased while geometry size(i.e., the smallest component (or line) that can be created using afabrication process) has decreased. This scaling down process generallyprovides benefits by increasing production efficiency and loweringassociated costs. Such scaling down has also increased the complexity ofprocessing and manufacturing ICs and, for these advancements to berealized, similar developments in IC processing and manufacturing areneeded.

For example, multi-gate devices have been introduced in an effort toimprove gate control by increasing gate-channel coupling, reduceOFF-state current, and reduce short-channel effects (SCEs). One suchmulti-gate device is horizontal gate-all-around (HGAA) transistor, whosegate structure extends around its horizontal channel region providingaccess to the channel region on all sides. The HGAA transistors arecompatible with conventional complementary metal-oxide-semiconductor(CMOS) processes, allowing them to be aggressively scaled down whilemaintaining gate control and mitigating SCEs. However, fabrication ofthe HGAA transistors can be challenging. For example, source and drain(S/D) formation for HGAA transistors by the current methods is notsatisfactory in all respects, especially when the device pitch is small,such as 40 nanometers (nm) or smaller.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isemphasized that, in accordance with the standard practice in theindustry, various features are not drawn to scale. In fact, thedimensions of the various features may be arbitrarily increased orreduced for clarity of discussion.

FIGS. 1A and 1B are a flow chart of a method of forming a semiconductordevice according to various aspects of the present disclosure.

FIG. 2 is a perspective view of a portion of a semiconductor device inan intermediate stage of fabrication according to an embodiment of themethod in FIGS. 1A and 1B.

FIGS. 3A, 4A, 5A, 6A, 7A, 8A, 9A, 10A, 11A, and 12A are cross-sectionalviews of a portion of the semiconductor device in FIG. 2, along the“A-A” line of FIG. 2, in accordance with some embodiments.

FIGS. 3B, 4B, 5B, 6B, 7B, 8B, 9B, 10B, 11B, and 12B are cross-sectionalviews of a portion of the semiconductor device in FIG. 2, along the“B-B” line of FIG. 2, in accordance with some embodiments.

FIGS. 3C, 4C, 5C, 6C, 7C, 8C, 9C, 10C, 11C, and 12C are cross-sectionalviews of a portion of the semiconductor device in FIG. 2, along the“C-C” line of FIG. 2, in accordance with some embodiments.

FIGS. 8D, 8E, 8F, and 8G illustrate some source and drain features ofsemiconductor devices, according to various aspects of the presentdisclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

The present disclosure is generally related to semiconductor devices andmethods of forming the same. More particularly, the present disclosureis related to gate-all-around (GAA) devices. A GAA device includes anydevice that has its gate structure, or portions thereof, formed onfour-sides of a channel region (e.g., surrounding a portion of a channelregion). The channel region of a GAA device may include nanowirechannels, bar-shaped channels, and/or other suitable channelconfigurations. In embodiments, the channel region of a GAA device mayhave multiple horizontal nanowires or horizontal bars vertically spaced,making the GAA device a stacked horizontal GAA (S-HGAA) device. The GAAdevices presented herein may include p-type metal-oxide-semiconductorGAA devices or n-type metal-oxide-semiconductor GAA devices. Further,the GAA devices may have one or more channel regions (e.g., nanowires)associated with a single, contiguous gate structure, or multiple gatestructures. One of ordinary skill may recognize other examples ofsemiconductor devices that may benefit from aspects of the presentdisclosure.

FIGS. 1A and 1B show a flow chart of a method 10 of forming asemiconductor device 100, according to various aspects of the presentdisclosure. The method 10 is merely an example, and is not intended tolimit the present disclosure beyond what is explicitly recited in theclaims. Additional operations can be provided before, during, and afterthe method 10, and some operations described can be replaced,eliminated, or moved around for additional embodiments of the method.The method 10 is described below in conjunction with FIGS. 2-12C. FIG. 2is a perspective view of a portion of the semiconductor device 100 in anintermediate stage of fabrication. FIGS. 3A-12A, 3B-12B, and 3C-12C arecross-sectional views of the semiconductor device 100 in various stagesof a manufacturing process, taken along the “A-A,” “B-B,” and “C-C”lines of FIG. 2 respectively.

The semiconductor device 100 is provided for illustration purposes anddoes not necessarily limit the embodiments of the present disclosure toany number of devices, any number of regions, or any configuration ofstructures or regions. Furthermore, the semiconductor device 100 asshown in FIGS. 2-12C may be an intermediate device fabricated duringprocessing of an IC, or a portion thereof, that may comprise staticrandom access memory (SRAM) and/or logic circuits, passive componentssuch as resistors, capacitors, and inductors, and active components suchas p-type field effect transistors (PFETs), n-type FETs (NFETs),multi-gate FETs such as FinFETs, metal-oxide semiconductor field effecttransistors (MOSFETs), complementary metal-oxide semiconductor (CMOS)transistors, bipolar transistors, high voltage transistors, highfrequency transistors, other memory cells, and combinations thereof.

At operation 12, the method 10 (FIG. 1A) forms one or more fins 104extending from a substrate 102 and each fin 104 includes a stack ofsemiconductor layers 108 and 110. Referring to FIG. 2, in the presentembodiment, the device 100 includes two fins 104, and each fin 104includes two semiconductor layers 108 and two semiconductor layers 110.The two fins 104 are oriented lengthwise along the “y” direction and arearranged side by side along the “x” direction. The lower portions of thefins 104 are separated by an isolation structure 106. The semiconductorlayers 108 and 110 are vertically stacked (along the “z” direction) inan alternating fashion (e.g., a first layer 110 disposed over a firstlayer 108, a second layer 108 disposed over the first layer 110, and asecond layer 110 disposed over the second layer 108, and so on). Invarious embodiments, the device 100 may include any number of fins 104and the fins 104 may include any number of alternately stackedsemiconductor layers 108 and 110.

Still referring to FIG. 2, the fins 104 each include two source/drain(S/D) regions 104 a and a channel region 104 b between the two S/Dregions 104 a. The “A-A” line is taken across one of the S/D regions 104a, the “B-B” line is taken across the channel region 104 b, and the“C-C” line is taken lengthwise across one of the fins 104. The followingdiscussion is made with reference to FIGS. 2, 3A, 3B, and 3Ccollectively.

In embodiments, the substrate 102 may be a semiconductor substrate suchas a silicon substrate. The substrate 102 may include various layers,including conductive or insulating layers formed on a semiconductorsubstrate. The substrate 102 may include various doping configurations.For example, different doping profiles (e.g., n wells, p wells) may beformed on the substrate 102 in regions designed for different devicetypes (e.g., n-type field effect transistors (NFET), p-type field effecttransistors (PFET)). The substrate 102 may also include othersemiconductors such as germanium, silicon carbide (SiC), silicongermanium (SiGe), or diamond. Alternatively, the substrate 102 mayinclude a compound semiconductor and/or an alloy semiconductor. Further,the substrate 102 may optionally include an epitaxial layer, may bestrained for performance enhancement, may include a silicon-on-insulatorstructure, and/or have other suitable enhancement features.

The two fins 104 are spaced (along the “x” direction) by a spacing S(FIGS. 3A and 3B). In an embodiment, the spacing S is designed to beless than 50 nm, such as in a range from about 10 nm to about 30 nm, fortight device integration. The isolation structures 106 may be formed ofsilicon oxide, silicon nitride, silicon oxynitride, fluoride-dopedsilicate glass, a low-k dielectric material, and/or other suitableinsulating material. The isolation structures 106 may be shallow trenchisolation (STI) features.

The semiconductor layers 108 and 110 may have different thicknesses. Thesemiconductor layers 108 may have different thicknesses from one layerto another layer. The semiconductor layers 110 may have differentthicknesses from one layer to another layer. The thickness of each ofthe semiconductor layers 108 and 110 may range from few nanometers tofew tens of nanometers. The first layer of 108 (which is partiallyburied in the isolation structure 106) may be much thicker than othersemiconductor layers 108 and 110. In an embodiment, each semiconductorlayer 108 that extends above the isolation structure 106 has a thicknessranging from about 5 nm to about 20 nm, and each semiconductor layer 110has a thickness ranging from about 5 nm to about 20 nm.

The two semiconductor layers 108 and 110 have different compositions. Invarious embodiments, the two semiconductor layers 108 and 110 providefor different oxidation rates and/or different etch selectivity. In anembodiment, the semiconductor layers 108 include silicon germanium(SiGe), and the semiconductor layers 110 include silicon (Si). Tofurther this embodiment, the Si layer 110 may be undoped orsubstantially dopant-free (i.e., having an extrinsic dopantconcentration from about 0 cm⁻³ to about 1×10¹⁷ cm⁻³), where forexample, no intentional doping is performed when forming the Si layer110. Alternatively, the Si layer 110 may be intentionally doped. Forexample, the Si layer 110 may be doped with a p-type dopant such asboron (B), aluminum (Al), indium (In), and gallium (Ga) for forming ap-type channel, or an n-type dopant such as phosphorus (P), arsenic(As), antimony (Sb), for forming an n-type channel. Furthermore, theSiGe layer 108 may include more than 25% Ge in molar ratio. For example,Ge may comprise about 25% to 50% of the SiGe layer 108 in molar ratio.Furthermore, the semiconductor layers 108 may include differentcompositions among them, and the semiconductor layers 110 may includedifferent compositions among them.

In various embodiments, either of the semiconductor layers 108 and 110may include other materials such as germanium, a compound semiconductorsuch as silicon carbide, gallium arsenide, gallium phosphide, indiumphosphide, indium arsenide, and/or indium antimonide, an alloysemiconductor such as GaAsP, AlInAs, AlGaAs, InGaAs, GaInP, and/orGaInAsP, or combinations thereof. The materials of the semiconductorlayers 108 and 110 may be chosen based on providing differing oxidationrates and/or etch selectivity. The semiconductor layers 108 and 110 maybe doped or undoped, as discussed above.

The operation 12 may include a variety of processes such as deposition,epitaxy, photolithography, and etching. Further, the operation 12 mayform the isolation structure 106 and the fins 104 in different orders.In an embodiment, the operation 12 forms the isolation structure 106before it forms the fins 104 (an isolation-first scheme). In anotherembodiment, the operation 12 forms the fins 104 before it forms theisolation structure 106 (a fin-first scheme). These two embodiments arefurther discussed below by way of examples.

In an isolation-first scheme, first, the operation 12 forms a maskingelement over the substrate 102 through a photolithography process. Thephotolithography process may include forming a photoresist (or resist)over the substrate 102, exposing the resist to a pattern that definesvarious geometrical shapes, performing post-exposure bake processes, anddeveloping the resist to form the masking element.

Subsequently, the operation 12 etches the substrate 102 through themasking element to form first trenches therein. The etching processesmay include one or more dry etching processes, wet etching processes,and other suitable etching techniques. For example, a dry etchingprocess may implement an oxygen-containing gas, a fluorine-containinggas (e.g., CF₄, SF₆, CH₂F₂, CHF₃, and/or C₂F₆), a chlorine-containinggas (e.g., Cl₂, CHCl₃, CCl₄, and/or BCl₃), a bromine-containing gas(e.g., HBr and/or CHBR₃), an iodine-containing gas, other suitable gasesand/or plasmas, and/or combinations thereof. For example, a wet etchingprocess may comprise etching in diluted hydrofluoric acid (DHF);potassium hydroxide (KOH) solution; ammonia; a solution containinghydrofluoric acid (HF), nitric acid (HNO₃), and/or acetic acid(CH₃COOH); or other suitable wet etchant. The one or more etchingprocesses form the first trenches in the substrate 102.

Subsequently, the operation 12 fills the first trenches with adielectric material, such as silicon oxide, and performs a chemicalmechanical planarization (CMP) process to planarize top surfaces of thedielectric material and the substrate 102. The dielectric material maybe formed by chemical vapor deposition (CVD), plasma enhanced CVD(PECVD), physical vapor deposition (PVD), thermal oxidation, or othertechniques. This layer of dielectric material is referred to as thedielectric layer 106, which isolates various portions of the substrate102.

Next, the operation 12 etches the substrate 102 while the dielectriclayer 106 remains substantially unchanged through a selective etchingprocess, thereby forming second trenches between various portions of thedielectric layer 106. The second trenches are etched to a desired depthfor growing the fins 104 therein. The etching process may be a dryetching process, a wet etching process, or another suitable etchingtechnique.

Subsequently, the operation 12 epitaxially grows the semiconductorlayers 108 and 110 in the second trenches. For example, each of thesemiconductor layers 108 and 110 may be grown by a molecular beamepitaxy (MBE) process, a chemical vapor deposition (CVD) process such asa metal organic CVD (MOCVD) process, and/or other suitable epitaxialgrowth processes. In some embodiments, the epitaxially grown layers,such as the layers 108, include the same material as the substrate 102.In some embodiments, the epitaxially grown layers 108 and 110 include adifferent material than the substrate 102. Further embodiments of thematerials of the layers 108 and 110 have been discussed above. Achemical mechanical planarization (CMP) process may be performed toplanarize a top surface of the device 100.

Subsequently, the operation 12 recesses the dielectric layer 106 toprovide the fins 104 extending above a top surface 106′ of thedielectric layer 106, as shown in FIGS. 2 and 3A-3C. In someembodiments, a recessing depth is controlled (e.g., by controlling anetching time) so as to obtain a desired height of the exposed upperportion of the fins 104. The remaining portions of the dielectric layer106 become the isolation structure 106.

In a fin-first scheme, the operation 12 may include substantially thesame or similar processes as discussed above, albeit in differentorders. Hence, it is briefly described. First, the operation 12epitaxially grows semiconductor layers over the substrate 102. Then, theoperation 12 forms a masking element over the semiconductor layersthrough a photolithography process. Subsequently, the operation 12etches the semiconductor layers through the masking element to formtrenches therein. The remaining portions of the semiconductor layersbecome the fins 104 that include the semiconductor layers 108 and 110.Subsequently, the operation 12 deposits a dielectric material, such assilicon oxide, into the trenches. A chemical mechanical planarization(CMP) process may be performed to planarize a top surface of the device100. Thereafter, the dielectric material is recessed to form theisolation structure 106.

At operation 14, the method 10 (FIG. 1A) forms a gate stack 111 over thefins 104 and the isolation structure 106. In the present embodiment, thegate stack 111 will be removed in a later gate-replacement process.Hence, it is referred to as the dummy gate stack 111. Referring to FIGS.4A-4C, the dummy gate stack 111 engages the fins 104 at the channelregion 104 b. The dummy gate stack 111 may include single or multiplelayers of materials. In the present embodiment, the dummy gate stack 111includes a polysilicon (or poly) layer 112, a dielectric etch stop (orCMP stop) layer 114, and a dielectric hard mask layer 116. In anembodiment, the dummy gate stack 111 further includes an interfaciallayer (e.g., silicon oxide) underneath the poly layer 112. The etch stoplayer 114 may include silicon oxide, silicon nitride, siliconoxynitride, or other dielectric materials. The hard mask layer 116 mayinclude one or more layers of material such as silicon oxide and/orsilicon nitride. The poly layer 112 may be formed by suitable depositionprocesses such as low-pressure chemical vapor deposition (LPCVD) andPECVD. The etch stop layer 114 and the hard mask layer 116 each may beformed by chemical oxidation, thermal oxidation, atomic layer deposition(ALD), CVD, and/or other suitable methods. In an embodiment, the variouslayers of the dummy gate stack 111 are first deposited as blanketlayers, and then patterned with one or more photolithography and etchingprocesses to form the dummy gate stack 111.

At operation 16, the method 10 (FIG. 1A) forms a gate spacer 118 onsidewalls of the dummy gate stack 111. In an embodiment, the operation16 includes a deposition process and an etching process, which areillustrated in FIGS. 5A-5C and FIGS. 6A-6C respectively. Referring toFIGS. 5A-5C, a spacer layer 118 is deposited over the device 100,covering the various features thereon. The spacer layer 118 may includeone or more dielectric materials such as silicon nitride, silicon oxide,silicon carbide, silicon oxycarbide (SiOC), silicon oxycarbon nitride(SiOCN), other materials, or a combination thereof. The spacer layer 118may include a single layer or a multilayer structure. In the presentembodiment, the spacer layer 118 has a thickness of few nanometers. Thespacer layer 118 may be formed by chemical oxidation, thermal oxidation,ALD, CVD, and/or other suitable methods. Referring to FIGS. 6A-6C, thespacer layer 118 is etched by an anisotropic etching process to removeportions of the spacer layer 118 from a top surface of the dummy gatestack 111 and from top and sidewall surfaces of the fins 104. Portionsof the spacer layer 118 on the sidewall surfaces of the dummy gate stack111 substantially remain and become the gate spacer 118. In anembodiment, the anisotropic etching process is a dry (e.g., plasma)etching process.

At operation 18, the method 10 (FIG. 1A) removes the semiconductorlayers 108, or portions thereof, from the S/D regions 104 a to formspaces 120. Referring to FIGS. 7A-7C, the portions of the semiconductorlayers 108 that are covered by the dummy gate stack 111 or buried in theisolation structure 106 are slightly etched or not etched. Further, thesemiconductor layers 110 are slightly etched or not etched by theoperation 18. As a result, portions of the semiconductor layers 110 inthe S/D regions 104 a become suspended in the spaces 120 (see FIGS. 7Aand 7C). In the following discussion, the portions of the semiconductorlayers 110 suspended in the spaces 120 are also referred to the S/Dsemiconductor layers 110.

In an embodiment, the semiconductor layers 108 are etched by a selectivewet etching process that is tuned to remove the semiconductor layers 108while the semiconductor layers 110 remain substantially unchanged. Insome embodiments, the selective wet etching process may include a hydrofluoride (HF) or NH₄OH etchant. In an embodiment where the semiconductorlayers 108 comprise SiGe and the semiconductor layers 110 comprise Si,the selective removal of the SiGe layers 108 may include a SiGeoxidation process followed by a SiGeOx removal. For example, the SiGeoxidation process may include forming and patterning various maskinglayers such that the oxidation is controlled to the SiGe layers 108. Inother embodiments, the SiGe oxidation process is a selective oxidationdue to the different compositions of the semiconductor layers 108 and110. In some examples, the SiGe oxidation process may be performed byexposing the device 100 to a wet oxidation process, a dry oxidationprocess, or a combination thereof. Thereafter, the oxidizedsemiconductor layers 108, which include SiGeOx, are removed by anetchant such as NH₄OH or diluted HF.

In various embodiments, the semiconductor layers 108 and 110 provide fordifferent oxidation rates and/or different etch selectivity, whichenables the selective removal of the semiconductor layers 108 by theoperation 18. In an embodiment, the semiconductor layers 110 areslightly etched by the operation 108 to obtain a desirable dimension andshape in the S/D regions 104 a. For example, the resultant S/Dsemiconductor layers 110 may have a bar-like shape (as shown in FIGS. 7Aand 7C), a rod-like shape (not shown), or other shapes.

At operation 20, the method 10 (FIG. 1A) epitaxially grows asemiconductor layer 122 in the S/D regions 104 a. Referring to FIGS.8A-8C, the semiconductor layer 122 wraps around each of the S/Dsemiconductor layers 110 and directly contact the S/D semiconductorlayers 110 on all four sides thereof. In the embodiment shown in FIG.8A, the semiconductor layers 122 and 110 collectively form a vertical(along the “z” direction) bar-like shape. In another embodiment as shownin FIG. 8D, the semiconductor layer 122 may include a plurality ofportions and each portion wraps around a respective S/D semiconductorlayer 110. Further, each portion of the semiconductor layer 122 may havea diamond shape or another shape. In another embodiment as shown in FIG.8E, the plurality of portions of the semiconductor layer 122 may mergeinto one large piece. In some embodiments, the width of thesemiconductor layer 122 (along the “x” direction) ranges from a fewnanometers to about 30 nm.

In an embodiment, the semiconductor layer 122 includes the same materialas the S/D semiconductor layers 110. For example, they both includesilicon. In an alternative embodiment, the semiconductor layers 122 and110 may include different materials or compositions. In variousembodiments, the semiconductor layer 122 may include a semiconductormaterial such as silicon or germanium; a compound semiconductor such assilicon germanium, silicon carbide, gallium arsenide, gallium phosphide,indium phosphide, indium arsenide, indium antimonide; an alloysemiconductor such GaAsP, AlInAs, AlGaAs, InGaAs, GaInP, and/or GaInAsP;or combinations thereof.

In an embodiment, the semiconductor layer 122 is grown by a molecularbeam epitaxy (MBE) process, a chemical vapor deposition process, and/orother suitable epitaxial growth processes. In a further embodiment, thesemiconductor layer 122 is in-situ or ex-situ doped with an n-typedopant or a p-type dopant. For example, in some embodiments, thesemiconductor layer 122 includes silicon-germanium (SiGe) doped withboron for forming S/D features for a PFET. In some embodiments, thesemiconductor layer 122 includes silicon doped with phosphorous forforming S/D features for a NFET. To further these embodiments, the SiGelayer 122 may include Ge ranging from about 10% to about 70% in molarratio. In an embodiment, the semiconductor layer 122 is highly doped inorder to form an ohmic contact with an S/D contact metal to be laterformed in the device 100.

In the present embodiment, the semiconductor layers 122 and 110collectively serve as S/D features for the device 100. In an embodiment,the semiconductor layers 122 and 110 include the same type of dopant(e.g., both are n-type doped or both are p-type doped), but the dopantconcentration is higher in the semiconductor layer 122 than in the S/Dsemiconductor layers 110. In a further embodiment, the semiconductorlayers 122 and 110 may include the same type of dopants but may havedifferent dopant species.

Embodiments of the present disclosure provide advantages over othermethods in forming S/D features of a HGAA device. In a method as shownin FIG. 8F, fins 204 (comparable to the fins 104) are fully etched intheir respective S/D regions and semiconductor layers 206 aresubsequently grown in the respective S/D regions as the S/D features fora HGAA device 200. The semiconductor layers 206 each have a diamondshape due to the different growth rates at the different crystallineorientations, which is an inherent property of the material in thesemiconductor layer 206. Consequently, the minimum spacing S1 betweenthe two fins 204 is limited in order to make the S/D features 206sufficiently large while preventing adjacent S/D features 206 frommerging together. In contrast, embodiments of the present disclosuregrows the semiconductor layer 122 (an S/D feature) using the S/Dsemiconductor layers 110 as a base, which limits the lateral growth ofthe semiconductor layer 122. This is illustrated in FIG. 8G with anembodiment where the fin 104 includes five S/D semiconductor layers 110.Referring to FIG. 8G, in an intermediate epitaxial growth stage, eachsemiconductor layer 122′ grows off a respective S/D semiconductor layer110. The lateral growth of the semiconductor layers 122′ is limited bythe size and shape of the respective S/D semiconductor layers 110. Asthe semiconductor layers 122′ grow, they merge into a largersemiconductor layer 122, which has a vertical bar-like shape. As aresult of the limited lateral growth of the semiconductor layers 122′,the minimum spacing S2 between two adjacent fins 104 can be made smallerthan S1, which advantageously increases the integration of thesemiconductor device.

At operation 22, the method 10 (FIG. 1B) forms an inter-layer dielectric(ILD) layer 126 over the semiconductor layer 122 and the isolationstructure 106. Referring to FIGS. 9A-9C, in the present embodiment, acontact etch stop (CES) layer 124 is formed over the semiconductor layer122 and the isolation structure 106 prior to the formation of the ILDlayer 126. The CES layer 124 may include a dielectric material such assilicon nitride, silicon oxide, silicon oxynitride, and/or othermaterials. The CES layer 124 may be formed by ALD, PECVD, or othersuitable deposition or oxidation processes. The ILD layer 126 mayinclude materials such as tetraethylorthosilicate oxide, un-dopedsilicate glass, or doped silicon oxide such as borophosphosilicateglass, fused silica glass, phosphosilicate glass, boron doped siliconglass, and/or other suitable dielectric materials. The ILD layer 126 maybe deposited by a PECVD process, a flowable CVD (FCVD) process, or othersuitable deposition technique. In an embodiment, after the CES layer 124and the ILD layer 126 are deposited, a CMP process is performed toplanarize a top surface of the device 100, which also removes the hardmask layer 116 and the etch stop layer 114 (FIGS. 8B and 8C). As aresult, the poly layer 112 is exposed from a top surface of the device100.

At operation 24, the method 10 (FIG. 1B) removes the dummy gate stack111 to expose the channel region 104 b of the fins 104. Referring toFIGS. 10A-10C, the dummy gate stack 111 (see FIGS. 9B and 9C), whichincludes the poly layer 112 and any other layers thereunder, is removedto form an opening 128. The channel region 104 b of the fins 104 areexposed in the opening 128. In an embodiment, the operation 24 includesone or more etching processes, such as wet etching, dry etching, orother etching techniques.

At operation 26, the method 10 (FIG. 1B) removes portions of thesemiconductor layers 108 through the opening 128. Referring to FIGS.11A-11C, the semiconductor layers 108, or portions thereof, in thechannel region 104 b are removed. As a result, portions of thesemiconductor layers 110 in the channel region 104 b are suspended inthe opening 128. In the following discussion, the portions of thesemiconductor layers 110 suspended in the opening 128 are also referredto as the channel semiconductor layers 110. The channel semiconductorlayers 110 are slightly etched or not etched by the operation 26. In thepresent embodiment, the channel semiconductor layers 110 are slightlyetched to form a rod-like shape (e.g., a nanowire) (see FIG. 11B). Invarious embodiment, the channel semiconductor layers 110 (FIG. 11B) andthe S/D semiconductor layers 110 (FIG. 11A) may have same or differentcross-sectional profiles. For example, either or both of them may have arectangular shape, a round shape, or another geometrical shape in the“x-z” plane.

In an embodiment, the selective removal of the semiconductor layers 108by the operation 26 may use the same technique(s) discussed above withreference to the operation 18. In an embodiment, the remaining portionsof the semiconductor layer 108 are oxidized to become an oxidation layer108′ for isolation purposes. To further this embodiment, the oxidationprocess may include a wet oxidation process, a dry oxidation process, ora combination thereof. In one example, the device 100 is exposed to awet oxidation process using water vapor or steam as the oxidant. In oneexample where the semiconductor layer 108 includes silicon-germanium,the oxidation layer 108′ includes silicon or silicon-germanium oxide.

At operation 28, the method 10 (FIG. 1B) forms a gate stack 129 over thechannel region 104 b of the fins 104. Referring to FIGS. 12A-12C, thegate stack 129 fills the opening 128 (FIGS. 11B and 11C) and wrapsaround each of the channel semiconductor layers 110 (e.g., nanowires).In the present embodiment, the gate stack 129 includes a dielectriclayer 130 which may consist of one or multiple layers of dielectricmaterials on interior surfaces of the opening 128 and directly wrappingover each of the channel semiconductor layers 110. The gate stack 129further includes a gate metal stack 132 which may consist of one ormultiple layers over the dielectric layer 130, and a metal fill layer134 over the gate metal stack 132. As shown in FIG. 12B, the layers 130and 132 wrap around each of the channel semiconductor layers 110 (e.g.,nanowires) to form transistor channels thereof. The thicknesses of thelayers 130 and 132 are controlled so that the layers 132 from adjacenttransistor channels do not contact each other. Referring to FIGS. 12Band 12C, the gate stack 129 wraps around the vertically-stackedhorizontally-oriented channel semiconductor layers 110. Hence, thedevice 100 is a stacked horizontal gate-all-around (S-HGAA) device.Referring to FIG. 12A, the S/D region of the device 100 includesmultiple S/D semiconductor layers 110 spaced from each other, andfurther includes the semiconductor layer 122 that wraps around each ofthe multiple semiconductor layers 110.

In an embodiment, the dielectric layer 130 may include a dielectricmaterial such as silicon oxide or silicon oxynitride, and may be formedby chemical oxidation, thermal oxidation, ALD, CVD, and/or othersuitable methods. The dielectric layer 130 may also include a high-kdielectric layer such as hafnium oxide, zirconium oxide, lanthanumoxide, titanium oxide, yttrium oxide, strontium titanate, other suitablemetal-oxides, or combinations thereof; and may be formed by ALD and/orother suitable methods. In an embodiment, the gate metal stack 132 mayinclude a work function metal layer. The work function metal layer maybe a p-type work function metal layer or an n-type work function metallayer. The p-type work function metal layer comprises a metal selectedfrom, but not limited to, the group of titanium nitride, tantalumnitride, ruthenium, molybdenum, tungsten, platinum, or combinationsthereof. The n-type work function metal layer comprises a metal selectedfrom, but not limited to, the group of titanium, aluminum, tantalumcarbide, tantalum carbide nitride, tantalum silicon nitride, orcombinations thereof. The p-type or n-type work function metal layer mayinclude a plurality of layers and may be deposited by CVD, PVD, and/orother suitable process. The metal fill layer 134 may include aluminum,tungsten, cobalt, copper, and/or other suitable materials, and may beformed by CVD, PVD, plating, and/or other suitable processes. In anembodiment, after the various layers 130, 132, and 134 are deposited, aCMP process is performed to planarize a top surface of the device 100.

At operation 30, the method 10 (FIG. 1B) performs further processing tocomplete the fabrication of the S-HGAA device 100. For example, it mayform contact openings, contact metal, as well as various contacts, vias,wires, and multilayer interconnect features (e.g., metal layers andinterlayer dielectrics) over the substrate 102, configured to connectthe various features to form a functional circuit that may include oneor more multi-gate devices. In particular, it may form a contact metalpenetrating through the ILD layer 126 and contacting the semiconductorlayer 122.

Although not intended to be limiting, one or more embodiments of thepresent disclosure provide many benefits to a semiconductor device and aformation process thereof. For example, embodiments of the presentdisclosure form source and drain (S/D) features for stacked horizontalgate-all-around (S-HGAA) devices. The S/D features may be formed to havea narrow profile to fit into a tight fin-to-fin spacing. Thisadvantageously increases the level of integration for the S-HGAAdevices. Further, embodiments of the present disclosure may be used toform S-HGAA devices with any number of stacked channels, providing forgreat flexibility and scalability. Still further, embodiments of thepresent disclosure may be integrated into existing CMOS fabricationflow, providing for improved process window.

In one exemplary aspect, the present disclosure is directed to a methodof forming a semiconductor device. The method includes forming a finextending from a substrate. The fin has a source/drain (S/D) region anda channel region. The fin includes a first semiconductor layer and asecond semiconductor layer on the first semiconductor layer. The firstsemiconductor layer has a first composition, and the secondsemiconductor layer has a second composition different from the firstcomposition. The method further includes removing the firstsemiconductor layer from the S/D region of the fin such that a firstportion of the second semiconductor layer in the S/D region is suspendedin a space. The method further includes epitaxially growing a thirdsemiconductor layer in the S/D region, the third semiconductor layerwrapping around the first portion of the second semiconductor layer.

In another exemplary aspect, the present disclosure is directed to amethod of forming a semiconductor device. The method includes forming afin extending from a substrate. The fin includes a plurality of firstsemiconductor layers and a plurality of second semiconductor layers,wherein the first and second semiconductor layers are alternatelystacked. The method further includes forming a dummy gate stack over achannel region of the fin, and removing portions of the firstsemiconductor layers from S/D regions of the fin such that firstportions of the second semiconductor layers in the S/D regions each aresuspended in a respective space. The method further includes epitaxiallygrowing a third semiconductor layer in the S/D regions, wherein thethird semiconductor layer wraps around each of the first portions of thesecond semiconductor layers. The method further includes removing thedummy gate stack, thereby exposing the channel region of the fin. Themethod further includes removing portions of the first semiconductorlayers from the channel region of the fin such that second portions ofthe second semiconductor layers in the channel region each are suspendedin a respective space. The method further includes forming a gate stackover the channel region of the fin, wherein the gate stack wraps aroundeach of the second portions of the second semiconductor layers.

In yet another exemplary aspect, the present disclosure is directed to asemiconductor device. The semiconductor device includes a substrate, anda fin element extending from the substrate. The fin element includes achannel region and two source and drain (S/D) regions on opposing sidesof the channel region. The channel region includes channel semiconductorlayers spaced from each other. The S/D regions each include firstsemiconductor layers spaced from each other and a second semiconductorlayer wrapping around each of the first semiconductor layers. Thesemiconductor device further includes a gate stack disposed over thechannel region of the fin element and surrounding each of the channelsemiconductor layers.

The foregoing outlines features of several embodiments so that those ofordinary skill in the art may better understand the aspects of thepresent disclosure. Those of ordinary skill in the art should appreciatethat they may readily use the present disclosure as a basis fordesigning or modifying other processes and structures for carrying outthe same purposes and/or achieving the same advantages of theembodiments introduced herein. Those of ordinary skill in the art shouldalso realize that such equivalent constructions do not depart from thespirit and scope of the present disclosure, and that they may makevarious changes, substitutions, and alterations herein without departingfrom the spirit and scope of the present disclosure.

1. A method of forming a semiconductor device, the method comprising:forming a fin extending from a substrate, the fin having a source/drain(S/D) region and a channel region, wherein the fin includes a firstsemiconductor layer and a second semiconductor layer on the firstsemiconductor layer, the first semiconductor layer has a firstcomposition, and the second semiconductor layer has a second compositiondifferent from the first composition; removing the first semiconductorlayer from the S/D region of the fin such that a first portion of thesecond semiconductor layer in the S/D region is suspended in a space;and epitaxially growing a third semiconductor layer in the S/D region,the third semiconductor layer wrapping around the first portion of thesecond semiconductor layer.
 2. The method of claim 1, wherein the thirdsemiconductor layer is doped with a higher dopant concentration than thesecond semiconductor layer.
 3. The method of claim 2, wherein the secondand the third semiconductor layers each include silicon.
 4. The methodof claim 1, further comprising: removing the first semiconductor layerfrom the channel region of the fin such that a second portion of thesecond semiconductor layer is suspended in a space; and forming a gatestack over the channel region of the fin, wherein a portion of the gatestack wraps around the second portion of the second semiconductor layer.5. The method of claim 4, wherein the first and second portions of thesecond semiconductor layer have different cross-sectional profiles. 6.The method of claim 1, further comprising, before the removing of thefirst semiconductor layer from the S/D region of the fin: forming adummy gate stack covering the channel region of the fin.
 7. The methodof claim 6, further comprising, after the epitaxially growing of thethird semiconductor layer: forming an inter-layer dielectric (ILD) layerover the third semiconductor layer; removing the dummy gate stack toexpose the channel region of the fin; removing the first semiconductorlayer from the channel region of the fin such that a second portion ofthe second semiconductor layer is suspended in a space; and forming agate stack over the channel region of the fin, wherein a portion of thegate stack wraps around the second portion of the second semiconductorlayer.
 8. The method of claim 1, wherein the first semiconductor layerincludes silicon germanium and the second semiconductor layer includessilicon.
 9. The method of claim 1, wherein the first portion of thesecond semiconductor layer and the third semiconductor layercollectively form a vertical bar-like shape.
 10. A method of forming asemiconductor device, the method comprising: forming a fin extendingfrom a substrate, the fin having a plurality of first semiconductorlayers and a plurality of second semiconductor layers, the first andsecond semiconductor layers being alternately stacked; forming a dummygate stack over a channel region of the fin; removing portions of thefirst semiconductor layers from S/D regions of the fin such that firstportions of the second semiconductor layers in the S/D regions each aresuspended in a respective space; epitaxially growing a thirdsemiconductor layer in the S/D regions, wherein the third semiconductorlayer wraps around each of the first portions of the secondsemiconductor layers; removing the dummy gate stack, thereby exposingthe channel region of the fin; removing portions of the firstsemiconductor layers from the channel region of the fin such that secondportions of the second semiconductor layers in the channel region eachare suspended in a respective space; and forming a gate stack over thechannel region of the fin, wherein the gate stack wraps around each ofthe second portions of the second semiconductor layers.
 11. The methodof claim 10, further comprising, before the removing of the dummy gatestack: forming an inter-layer dielectric (ILD) layer over the thirdsemiconductor layer.
 12. The method of claim 10, wherein the firstsemiconductor layers each include silicon germanium and the secondsemiconductor layers each include silicon.
 13. The method of claim 10,further comprising, before the removing of the portions of the firstsemiconductor layers from the S/D regions of the fin: forming a gatespacer on sidewalls of the dummy gate stack.
 14. The method of claim 10,wherein the third semiconductor layer has a higher dopant concentrationthan each of the first portions of the second semiconductor layers. 15.The method of claim 10, wherein the removing of the portions of thefirst semiconductor layers from the S/D regions of the fin includes anetching process tuned to selectively remove the portions of the firstsemiconductor layers while the first portions of the secondsemiconductor layers in the S/D regions remain substantially unchanged.16-20. (canceled)
 21. A method of forming a semiconductor device, themethod comprising: forming a fin over a substrate, the fin having afirst semiconductor layer and a second semiconductor layer over thefirst semiconductor layer, the first and second semiconductor layershave different material compositions; forming a first gate stack over achannel region of the fin; removing a portion of the first semiconductorlayer from a source/drain (S/D) region of the fin such that a firstportion of the second semiconductor layer in the S/D region of the finis suspended in a space; epitaxially growing a third semiconductor layerin the S/D region of the fin, wherein the third semiconductor layerwraps around the first portion of the second semiconductor layer;removing the first gate stack, thereby exposing the channel region ofthe fin; removing another portion of the first semiconductor layer fromthe channel region of the fin such that a second portion of the secondsemiconductor layer in the channel region of the fin is suspended inanother space; and forming a second gate stack over the channel regionof the fin, wherein the second gate stack wraps around the secondportion of the second semiconductor layer.
 22. The method of claim 21,wherein the first semiconductor layer includes a first semiconductormaterial and is substantially dopant-free, and the third semiconductorlayer includes the first semiconductor material and is doped with oneof: an n-type dopant and a p-type dopant.
 23. The method of claim 21,wherein the first and third semiconductor layers are doped with a sametype of dopant, and the third semiconductor layer has a higher dopantconcentration than the first semiconductor layer.
 24. The method ofclaim 23, wherein the first and third semiconductor layers are dopedwith different dopant species.
 25. The method of claim 21, wherein thefirst and third semiconductor layers form a vertical bar-like shape inthe S/D region of the fin.